A N A M E R I C A N N A T I O N A L S T A N D A R D

SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY)

ASME B46.1-2002

(Revision of ASME B46.1-1995)

Date of Issuance: June 12, 2003

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CONTENTS

Foreword vii

Committee Roster ix

Correspondence with the B46 Committee x

Section 8 Nanometer Surface Roughness as Measured with Phase Measuring

Interferometric Microscopy 37

1. Scope of Section 8 37

2. Description and Definitions: Noncontact Phase Measuring Interferometer 37

3. Key Sources of Uncertainty 37

4. Noncontact Phase Measuring Interferometer Instrument Requirements 37

5. Test Methods 38

6. Measurement Procedures 38

7. Data Analysis and Reporting 39

8. References 39

Section 9 Filtering of Surface Profiles 41

1. Scope of Section 9 41

2. References 41

3. Definitions and General Specifications 41

4. 2RC Filter Specification for Roughness 42

5. Phase Correct Gaussian Filter for Roughness 44

6. Filtering for Waviness 47

Section 10 Terminology and Procedures for Evaluation of Surface Textures Using Fractal Geometry 49

1. General 49

2. Definitions Relative to Fractal Based Analyses of Surfaces 49

3. Reporting the Results of Fractal Analyses 52

4. References 54

Section 11 Specifications and Procedures for Precision Reference Specimens 55

1. Scope of Section 11 55

2. References 55

3. Definitions 55

4. Reference Specimens: Profile Shape and Application 55

5. Physical Requirements 56

6. Assigned Value Calculation 56

7. Mechanical Requirements 57

8. Marking 59

Section 12 Specifications and Procedures for Roughness Comparison Specimens 62

1. Scope of Section 12 62

2. References 62

3. Definitions 62

4. Roughness Comparison Specimens 62

5. Surface Characteristics 62

6. Nominal Roughness Grades 62

7. Specimen Size, Form, and Lay 62

8. Calibration of Comparison Specimens 63

9. Marking 63

Figures

1. Schematic Diagram of Surface Characteristics 2

2. Measured vs Nominal Profile 2

3. Stylus Profile Displayed With Two Different Aspect Ratios 3

4. Examples of Nominal Profiles 4

5. Filtering a Surface Profile 5

6. Profile Peak and Valley 5

7. Surface Profile Measurement Lengths 6

8. Illustration for the Calculation of Roughness Average Ra 7

9. Rt, Rp, and Rv Parameters 7

10. Surface Profile Containing Two Sampling Lengths, l1 and l2, Also

    Showing the Rpi and Rti Parameters 8

11. The Rt and Rmax Parameters 8

12. The Waviness Height, Wt 8

13. The Mean Spacing of Profile Irregularities, RSm 9

14. The Peak Count Level, Used for Calculating Peak Density 9

15. Amplitude Density Function—ADF(z) or p(z) 9

16. The Profile Bearing Length 10

17. The Bearing Area Curve and Related Parameters 10

18. Three Surface Profiles With Different Skewness 10

19. Three Surface Profiles With Different Kurtosis 11

20. Topographic Map Obtained by an Area Profiling Method 13

21. Area Peaks (Left) and Area Valleys (Right) 13

22. Comparison of Profiles Measured in Two Directions on a Uniaxial,

Periodic Surface Showing the Difference in Peak Spacing as a Function

of Direction 14

2-1 Classification of Common Instruments for Measurement of Surface

Texture 17

1. Profile Coordinate System 20

2. Conical Stylus Tip 20

3. Truncated Pyramid Tip 21

4. Aliasing 22

1. Schematic Diagrams of a Typical Stylus Probe and Fringe-Field Capacitance

   Probe 26

2. Effects of Various Cutoff Values 27

3. Examples of Profile Distortion Due to Skid Motion 28

4. Example of Profile Distortion 29

1. The Radius of Curvature for a Surface Sine Wave 33

2. Stylus Tip Touching Bottom and Shoulders of Groove 33

3. The Stylus Tip Contact Distance, x 34

1. A Typical Phase Measuring Interferometer System 38

2. Demonstration of the Detector Array With Element Spacing and the Measurement of the Longest Spatial Wavelength, L Covering the Total

   Number (N) Pixels 39

3. Demonstration of the Detector Array With Element spacing and the Measurement of the Smallest Spatial Wavelength R Covering 5 Pixels 40

1. Wavelength Transmission Characteristics for the 2RC Filter System 42

2. Gaussian Transmission Characteristics Together With the Uncertain

   Nominal Transmission Characteristic of a 2 m Stylus Radius 43

3. Weighting Function of the Gaussian Profile Filter 44

4. Gaussian Transmission Characteristic for the Waviness Short-Wavelength Cutoff or for Deriving the Roughness Mean Line Having Cutoff

   Wavelengths c p 0.08, 0.25, 0.8, 2.5, and 8.0 mm 45

5. Gaussian Transmission Characteristic for the Roughness Long- Wavelength Cutoff Having Cutoff Wavelengths c p 0.08, 0.25, 0.8,

   2.5, and 8.0 mm 46

6. Example of a Deviation Curve of an Implemented Filter From the Ideal

Gaussian Filter as a Function of Spatial Wavelength 47

1. Self-Similarity Illustrated on a Simulated Profile 49

2. An Idealized Log-Log Plot of Relative Length (of a Profile) or Relative

   Area (of a Surface) Versus the Scale of Observation 50

3. An Idealized Log-Log Plot of Relative Length or Area Versus the Scale of Observation (Length-Scale or Area-Scale Plot), Showing Multi-Fractal Characteristics and Crossover Scales 50

4. Three Stepping Exercises from a Length-Scale Analysis on a Simulated

   Profile 51

   
   

   10-5	Four Tiling Exercises From an Area-Scale Analysis, Illustrated for a Diamond
   	Coating on a Silicon Substrate, Fabricated and Measured With a
   	Scanning Tunneling Microscope at UNCC ................................	52
   10-6	An Area-Scale Plot Including the Results of the Tiling Series in Fig. 10-5 .....	53
   11-1	Type A1 Groove ...........................................................	55
   11-2	Type A2 Groove ...........................................................	55
   11-3	Allowable Waviness Height Wt for Roughness Calibration Specimens .......	56
   11-4	Assessment of Calibrated Values for Type A1 ...............................	57
   11-5	Type B1 Grooves: Set of 4 Grooves .........................................	57
   11-6	Type B2 or C2 Specimens With Multiple Grooves ...........................	58
   11-7	Use of Type B3 Specimen ..................................................	58
   11-8	Type C1 Grooves ...........................................................	59
   11-9	Type C3 Grooves ...........................................................	59
   11-10	Type C4 Grooves ...........................................................	59
   11-11	Unidirectional Irregular Grooves Having Profile Repitions at 4 mm
   	Intervals .................................................................	60
   Tables
   3-1	Cutoff Values for Periodic Profiles Using RSm ..............................	23
   3-2	Cutoff Values for Nonperiodic Profiles Using Ra ............................	24
   4-1	Measurement Cutoffs and Traversing Lengths for Continuously
   	Averaging Instruments Using Analog Meter Readouts ....................	25
   4-2	Measurement Cutoffs and Minimum Evaluation Lengths for Instruments
   	Measuring Integrated Roughness Values Over a Fixed Evaluation
   	Length ..................................................................	25
   9-1	Limits for the Transmission Characteristics for 2RC Long-Wavelength Cutoff
   	Filters ...................................................................	43